Argon gas dryer for Semiconductors application with capacity 100Nm3/hr -80 PDP with 12 inches HMI fully automatic
Argon dryers mainly used for remove the water of the main raw gas(Argon) , adsorption of hydrocarbon, halogenated hydrocarbons, organic sulfurous,nitrogenous and oxygenous compounds.
The dryers working process : Raw gas-water removing & removing other impurties-filtering-outlet .
This equipment including dryers, filters etc, the raw material will enter into dryers for removing water and impurities, two dryers working in turn , fully automatic switching (one working ,one standby), to finalize continuous drying . This process requires high efficient and quality adsorbent, strong, regenerated repeatedly, longer Worklife.After filtering Remove the dust then send the clean/pure hydrogen for working site.
1. Index
Flow : 10-10000 Nm3/Hr
Pressure : 5-10 bar (adjustable) Power supply : 380-460V/50-60Hz
Dew point : depends on the raw gas conditions
Not above -85 °C (at dew point temperature initial not above -70 °C)
Not above -80 °C (at dew point temperature initial not above -65 °C) Not above -72 °C (at dew point temperature initial not above -20 °C) Explosive-proof class: EXdⅡCT4(Instrument etc)
Regeneration Consumption : ＜ 3 %
2. Control system with its function
Fully automatic regeneration procedures control
PLC via the programming and parameter for operation, import and export signal, to control valves, heating elements start up and shut. To realize two dryers fully automatic switching working and regeneration .
2.1 Temperature control
Temperature controlled by PLC, SCR, thermocouples, heaters etc. All the parts will be via thermocouples inspected and transfer signal to PLC, PLC will according to programming , control SCR electric current thus control each parts. With temperature settings , alarming and blocking
protection to guarantee equipment safety working .
2.2 Alarming & blocking protection
Alarming functions including : temperature alarming, flow alarming, index alarming
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Deoxo Argon Gas Dryer For Semiconductors 12 Inches HMI Fully Automatic Images
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